SOI Wafer
Diameter
3", 100mm, 125mm, 150mm, 200mm
Device Layer
270nm - 100µm
BOX Layer
100nm - 10µm
Handle Layer
300µm - 775µm
• Thick-Film, Fusion-Bonding
• Epi-Layer-Transfer
• Oxygen Implantation
Diameter
3", 100mm, 125mm, 150mm, 200mm
Device Layer
270nm - 100µm
BOX Layer
100nm - 10µm
Handle Layer
300µm - 775µm
• Thick-Film, Fusion-Bonding
• Epi-Layer-Transfer
• Oxygen Implantation